Inventor
CARLSON CHRIS M
US59 patents
⚠️ This page may combine multiple inventors who share the name “CARLSON CHRIS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
47 patentsUS6890596B2May 10, 2005
Deposition methods
MICRON TECHNOLOGY INC418 citations99
US10164009B1Dec 25, 2018
Memory device including voids between control gates
MICRON TECHNOLOGY INC45 citations98
US10388665B1Aug 20, 2019
Methods of forming an array of elevationally-extending strings of memory cells having a stack comprising vertically-alternating insulative tiers and wordline tiers and horizontally-elongated trenches in the stack
MICRON TECHNOLOGY INC46 citations96
US6753271B2Jun 22, 2004
Atomic layer deposition methods
MICRON TECHNOLOGY INC40 citations96
US10453855B2Oct 22, 2019
Void formation in charge trap structures
MICRON TECHNOLOGY INC20 citations94
US10446572B2Oct 15, 2019
Void formation for charge trap structures
MICRON TECHNOLOGY INC19 citations94
US9978772B1May 22, 2018
Memory cells and integrated structures
MICRON TECHNOLOGY INC24 citations94
US6855594B1Feb 15, 2005
Methods of forming capacitors
MICRON TECHNOLOGY INC16 citations93
US10680006B2Jun 9, 2020
Charge trap structure with barrier to blocking region
MICRON TECHNOLOGY INC13 citations86
US11037951B2Jun 15, 2021
Void formation in charge trap structures
MICRON TECHNOLOGY INC8 citations84
US10937802B2Mar 2, 2021
Void formation for charge trap structures
MICRON TECHNOLOGY INC7 citations84
US10644105B2May 5, 2020
Memory device including voids between control gates
MICRON TECHNOLOGY INC9 citations84
US10388667B2Aug 20, 2019
Memory cells, integrated structures and memory arrays
MICRON TECHNOLOGY INC7 citations83
US7820506B2Oct 26, 2010
Capacitors, dielectric structures, and methods of forming dielectric structures
MICRON TECHNOLOGY INC10 citations83
US11974430B2Apr 30, 2024
Microelectronic devices with dopant extensions near a GIDL region below a tier stack, and related methods and systems
MICRON TECHNOLOGY INC4 citations75
US7303991B2Dec 4, 2007
Atomic layer deposition methods
MICRON TECHNOLOGY INC4 citations74
US7056784B2Jun 6, 2006
Methods of forming capacitors by ALD to prevent oxidation of the lower electrode
MICRON TECHNOLOGY INC10 citations74
US11569255B2Jan 31, 2023
Void formation in charge trap structures
MICRON TECHNOLOGY INC3 citations73
US11404571B2Aug 2, 2022
Methods of forming NAND memory arrays
MICRON TECHNOLOGY INC1 citations73
US11393843B2Jul 19, 2022
Charge trap structure with barrier to blocking region
MICRON TECHNOLOGY INC4 citations73
US11329127B2May 10, 2022
Memory device including voids between control gates
MICRON TECHNOLOGY INC3 citations73
US10446681B2Oct 15, 2019
NAND memory arrays, and devices comprising semiconductor channel material and nitrogen
MICRON TECHNOLOGY INC4 citations73
US10446574B2Oct 15, 2019
Memory cells and integrated structures
MICRON TECHNOLOGY INC2 citations73
US11672118B2Jun 6, 2023
Electronic devices comprising adjoining oxide materials and related systems
MICRON TECHNOLOGY INC2 citations72
US11152388B2Oct 19, 2021
Memory arrays and methods used in forming a memory array comprising strings of memory cells
MICRON TECHNOLOGY INC2 citations72
US10727249B2Jul 28, 2020
Memory cells, integrated structures and memory arrays
MICRON TECHNOLOGY INC1 citations72
US9499907B2Nov 22, 2016
Methods of forming material over a substrate and methods of forming capacitors
MICRON TECHNOLOGY INC4 citations72
US7807535B2Oct 5, 2010
Methods of forming layers comprising epitaxial silicon
MICRON TECHNOLOGY INC4 citations63
US7759717B2Jul 20, 2010
Capacitors comprising dielectric regions having first and second oxide material portions of the same chemical compositon but different densities
MICRON TECHNOLOGY INC1 citations63
US7709326B2May 4, 2010
Methods of forming layers comprising epitaxial silicon
MICRON TECHNOLOGY INC3 citations63
US7498057B2Mar 3, 2009
Deposition methods
MICRON TECHNOLOGY INC4 citations63
US7378354B2May 27, 2008
Atomic layer deposition methods
MICRON TECHNOLOGY INC3 citations63
US7368382B2May 6, 2008
Atomic layer deposition methods
MICRON TECHNOLOGY INC1 citations63
US12557289B2Feb 17, 2026
Electronic devices comprising adjoining oxide materials and related systems
MICRON TECHNOLOGY INC0 citations62
US12471283B2Nov 11, 2025
Microelectronic devices with source region vertical extension between upper and lower channel regions, and related methods
MICRON TECHNOLOGY INC0 citations62
US11943924B2Mar 26, 2024
Void formation for charge trap structures
MICRON TECHNOLOGY INC0 citations62
US11925022B2Mar 5, 2024
Microelectronic and semiconductor devices with a tunneling structure free of high-γ material by a select gate structure, and related methods
MICRON TECHNOLOGY INC0 citations62
US11923407B2Mar 5, 2024
Memory device including voids between control gates
MICRON TECHNOLOGY INC0 citations62
US11765903B2Sep 19, 2023
Charge trap structure with barrier to blocking region
MICRON TECHNOLOGY INC0 citations62
US11678483B2Jun 13, 2023
Memory arrays and methods used in forming a memory array
MICRON TECHNOLOGY INC0 citations62
US11211399B2Dec 28, 2021
Electronic apparatus with an oxide-only tunneling structure by a select gate tier, and related methods
MICRON TECHNOLOGY INC0 citations62
US11177269B2Nov 16, 2021
Memory arrays and methods used in forming a memory array
MICRON TECHNOLOGY INC0 citations62
US10910476B2Feb 2, 2021
Integrated structures having gallium-containing regions
MICRON TECHNOLOGY INC0 citations62
US11641742B2May 2, 2023
Memory arrays and methods used in forming a memory array comprising strings of memory cells
MICRON TECHNOLOGY INC0 citations61
US9209013B2Dec 8, 2015
Constructions comprising thermally conductive stacks containing rutile-type titanium oxide
MICRON TECHNOLOGY INC1 citations61
US11751393B2Sep 5, 2023
Memory arrays and methods used in forming a memory array comprising strings of memory cells
MICRON TECHNOLOGY INC0 citations59
US11205660B2Dec 21, 2021
Memory arrays and methods used in forming a memory array comprising strings of memory cells
MICRON TECHNOLOGY INC0 citations59
RAMASWAMY NIRMAL
1 patentLODESTAR LICENSING GROUP LLC
1 patentANTONOV VASSIL
1 patentShowing the top 50 of 59 patents by PatentIndex Score.