Inventor
HANKES MICHAEL CARL
US3 patents
Patents
3 patentsUS11817724B2Nov 14, 2023
Enclosure system with charging assembly
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US12166366B2Dec 10, 2024
Substrate enclosure system with assembly for charging a validation wafer
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US9496160B2Nov 15, 2016
Workpiece orienting and centering with a factory interface
APPLIED MATERIALS INC2 citations54