Inventor

KATSUKI SHINICHIRO

JP4 patents

Patents

4 patents

US12492488B2Dec 9, 2025

Silicon carbide epitaxial growth device and method of manufacturing silicon carbide epitaxial wafer

MITSUBISHI ELECTRIC CORP0 citations60

US7331228B2Feb 19, 2008

Acceleration sensor

MITSUBISHI ELECTRIC CORP2 citations54

US12451355B2Oct 21, 2025

Method of manufacturing semiconductor device and semiconductor manufacturing apparatus

MITSUBISHI ELECTRIC CORP0 citations44

US7673514B2Mar 9, 2010

Acceleration sensor having single and multi-layer substrates

MITSUBISHI ELECTRIC CORP1 citations44