Inventor
EDWARDS RICHARD D
US14 patents
⚠️ This page may combine multiple inventors who share the name “EDWARDS RICHARD D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
9 patentsUS6405096B1Jun 11, 2002
Method and apparatus for run-to-run controlling of overlay registration
ADVANCED MICRO DEVICES INC93 citations98
US6271602B1Aug 7, 2001
Method for reducing the susceptibility to chemical-mechanical polishing damage of an alignment mark formed in a semiconductor substrate
ADVANCED MICRO DEVICES INC39 citations91
US6815232B2Nov 9, 2004
Method and apparatus for overlay control using multiple targets
ADVANCED MICRO DEVICES INC27 citations88
US6912436B1Jun 28, 2005
Prioritizing an application of correction in a multi-input control system
ADVANCED MICRO DEVICES INC12 citations84
US6622061B1Sep 16, 2003
Method and apparatus for run-to-run controlling of overlay registration
ADVANCED MICRO DEVICES INC13 citations84
US6808946B1Oct 26, 2004
Method of using critical dimension measurements to control stepper process parameters
ADVANCED MICRO DEVICES INC7 citations74
US6207966B1Mar 27, 2001
Mark protection with transparent film
ADVANCED MICRO DEVICES INC12 citations73
US6266132B1Jul 24, 2001
Stepper with exposure time monitor
ADVANCED MICRO DEVICES INC14 citations68
US6790570B1Sep 14, 2004
Method of using scatterometry measurements to control stepper process parameters
ADVANCED MICRO DEVICES INC4 citations63