Inventor

FUKUSHIMA MORIYUKI

JP3 patents

Patents

3 patents

US5906797AMay 25, 1999

Treatment of NF3 -containing gases

KANTO DENKA KOGYO KK16 citations76

US5879646AMar 9, 1999

Treatment of NH3 -containing gases

KANTO DENKA KOGYO KK5 citations66

US7326279B2Feb 5, 2008

Method for removing harmful substance in vent gas

KANTO DENKA KOGYO KK1 citations45