Inventor

SHEN WEI-NING

US2 patents

Patents

2 patents

US7728969B2Jun 1, 2010

Methods and systems for identifying defect types on a wafer

KLA TENCOR TECH CORP11 citations76

US7538868B2May 26, 2009

Pattern recognition matching for bright field imaging of low contrast semiconductor devices

KLA TENCOR TECH CORP4 citations55