P

Inventor

DECK LESLIE L

US58 patents
⚠️ This page may combine multiple inventors who share the name “DECK LESLIE L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZYGO CORP

45 patents
US6882432B2Apr 19, 2005

Frequency transform phase shifting interferometry

ZYGO CORP179 citations99
US6195168B1Feb 27, 2001

Infrared scanning interferometry apparatus and method

ZYGO CORP180 citations99
US6924898B2Aug 2, 2005

Phase-shifting interferometry method and system

ZYGO CORP73 citations98
US6028670AFeb 22, 2000

Interferometric methods and systems using low coherence illumination

ZYGO CORP123 citations98
US5953124ASep 14, 1999

Interferometric methods and systems using low coherence illumination

ZYGO CORP95 citations98
US5589938ADec 31, 1996

Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration

ZYGO CORP126 citations98
US5402234AMar 28, 1995

Method and apparatus for the rapid acquisition of data in coherence scanning interferometry

ZYGO CORP122 citations98
US5309277AMay 3, 1994

High intensity illuminator

ZYGO CORP112 citations98
US6597460B2Jul 22, 2003

Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum

ZYGO CORP78 citations96
US5777741AJul 7, 1998

Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration

ZYGO CORP74 citations96
US5784164AJul 21, 1998

Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means

ZYGO CORP78 citations95
US7321430B2Jan 22, 2008

Vibration resistant interferometry

ZYGO CORP18 citations93
US7277183B2Oct 2, 2007

Vibration resistant interferometry

ZYGO CORP34 citations93
US5999263ADec 7, 1999

Method and apparatus for performing interferometric measurements with reduced sensitivity to vibration

ZYGO CORP30 citations93
US5600441AFeb 4, 1997

Interferometer and method for measuring the distance of an object surface with respect to the surface of a rotating disk

ZYGO CORP28 citations93
US5568003AOct 22, 1996

Method and apparatus for producing repeatable motion from biased piezoelectric transducers

ZYGO CORP31 citations93
US5208451AMay 4, 1993

Method and apparatus for automated focusing of an interferometric optical system

ZYGO CORP33 citations93
US8902431B2Dec 2, 2014

Low coherence interferometry with scan error correction

ZYGO CORP13 citations92
US8379218B2Feb 19, 2013

Fiber-based interferometer system for monitoring an imaging interferometer

ZYGO CORP20 citations92
US7978338B2Jul 12, 2011

Compound reference interferometer

ZYGO CORP14 citations92
US6717680B1Apr 6, 2004

Apparatus and method for phase-shifting interferometry

ZYGO CORP39 citations92
US7636166B2Dec 22, 2009

Interferometer system for monitoring an object

ZYGO CORP14 citations90
US6643024B2Nov 4, 2003

Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer

ZYGO CORP24 citations89
US10591284B2Mar 17, 2020

Metrology of multi-layer stacks

ZYGO CORP14 citations86
US8004688B2Aug 23, 2011

Scan error correction in low coherence scanning interferometry

ZYGO CORP9 citations84
US7564568B2Jul 21, 2009

Phase shifting interferometry with multiple accumulation

ZYGO CORP14 citations84
US7030995B2Apr 18, 2006

Apparatus and method for mechanical phase shifting interferometry

ZYGO CORP12 citations84
US6894788B2May 17, 2005

Interferometric system for automated radius of curvature measurements

ZYGO CORP19 citations84
US6744522B2Jun 1, 2004

Interferometer for measuring the thickness profile of thin transparent substrates

ZYGO CORP17 citations84
US7639367B2Dec 29, 2009

Interferometer system for monitoring an object

ZYGO CORP9 citations83
US7826064B2Nov 2, 2010

Interferometer system for monitoring an object

ZYGO CORP8 citations82
US8045175B2Oct 25, 2011

Equal-path interferometer

ZYGO CORP14 citations80
US7796273B2Sep 14, 2010

Phase-shifting interferometry in the presence of vibration

ZYGO CORP7 citations74
US6995848B2Feb 7, 2006

Method and apparatus for calibrating a wavelength-tuning interferometer

ZYGO CORP9 citations74
US6806965B2Oct 19, 2004

Wavefront and intensity analyzer for collimated beams

ZYGO CORP9 citations74
US6788422B2Sep 7, 2004

Method and apparatus for using quasi-stable light sources in interferometry applications

ZYGO CORP10 citations74
US10962348B2Mar 30, 2021

Method and apparatus for optimizing the optical performance of interferometers

ZYGO CORP1 citations63
US10890428B2Jan 12, 2021

Interferometric method and apparatus using calibration information relating a focus setting to a test object position

ZYGO CORP1 citations63
US10267617B2Apr 23, 2019

Method and apparatus for optimizing the optical performance of interferometers

ZYGO CORP1 citations63
US10190871B2Jan 29, 2019

Precision positioning system using a wavelength tunable laser

ZYGO CORP1 citations63
US8988690B2Mar 24, 2015

Interferometric encoder systems

ZYGO CORP2 citations63
US7948639B2May 24, 2011

Phase-shifting interferometry in the presence of vibration

ZYGO CORP1 citations63
US7796275B2Sep 14, 2010

Phase-shifting interferometry in the presence of vibration using phase bias

ZYGO CORP2 citations63
US7327469B2Feb 5, 2008

Method for compensating errors in interferometric surface metrology

ZYGO CORP6 citations63
US7042578B2May 9, 2006

Method and apparatus for absolute figure metrology

ZYGO CORP4 citations63

HONEYWELL INC

2 patents

DECK LESLIE L

2 patents

LIESENER JAN

1 patent

Showing the top 50 of 58 patents by PatentIndex Score.