Inventor
DECK LESLIE L
US58 patents
⚠️ This page may combine multiple inventors who share the name “DECK LESLIE L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
45 patentsUS6882432B2Apr 19, 2005
Frequency transform phase shifting interferometry
ZYGO CORP179 citations99
US6195168B1Feb 27, 2001
Infrared scanning interferometry apparatus and method
ZYGO CORP180 citations99
US6924898B2Aug 2, 2005
Phase-shifting interferometry method and system
ZYGO CORP73 citations98
US6028670AFeb 22, 2000
Interferometric methods and systems using low coherence illumination
ZYGO CORP123 citations98
US5953124ASep 14, 1999
Interferometric methods and systems using low coherence illumination
ZYGO CORP95 citations98
US5589938ADec 31, 1996
Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration
ZYGO CORP126 citations98
US5402234AMar 28, 1995
Method and apparatus for the rapid acquisition of data in coherence scanning interferometry
ZYGO CORP122 citations98
US5309277AMay 3, 1994
High intensity illuminator
ZYGO CORP112 citations98
US6597460B2Jul 22, 2003
Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum
ZYGO CORP78 citations96
US5777741AJul 7, 1998
Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration
ZYGO CORP74 citations96
US5784164AJul 21, 1998
Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means
ZYGO CORP78 citations95
US7321430B2Jan 22, 2008
Vibration resistant interferometry
ZYGO CORP18 citations93
US7277183B2Oct 2, 2007
Vibration resistant interferometry
ZYGO CORP34 citations93
US5999263ADec 7, 1999
Method and apparatus for performing interferometric measurements with reduced sensitivity to vibration
ZYGO CORP30 citations93
US5600441AFeb 4, 1997
Interferometer and method for measuring the distance of an object surface with respect to the surface of a rotating disk
ZYGO CORP28 citations93
US5568003AOct 22, 1996
Method and apparatus for producing repeatable motion from biased piezoelectric transducers
ZYGO CORP31 citations93
US5208451AMay 4, 1993
Method and apparatus for automated focusing of an interferometric optical system
ZYGO CORP33 citations93
US8902431B2Dec 2, 2014
Low coherence interferometry with scan error correction
ZYGO CORP13 citations92
US8379218B2Feb 19, 2013
Fiber-based interferometer system for monitoring an imaging interferometer
ZYGO CORP20 citations92
US7978338B2Jul 12, 2011
Compound reference interferometer
ZYGO CORP14 citations92
US6717680B1Apr 6, 2004
Apparatus and method for phase-shifting interferometry
ZYGO CORP39 citations92
US7636166B2Dec 22, 2009
Interferometer system for monitoring an object
ZYGO CORP14 citations90
US6643024B2Nov 4, 2003
Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer
ZYGO CORP24 citations89
US10591284B2Mar 17, 2020
Metrology of multi-layer stacks
ZYGO CORP14 citations86
US8004688B2Aug 23, 2011
Scan error correction in low coherence scanning interferometry
ZYGO CORP9 citations84
US7564568B2Jul 21, 2009
Phase shifting interferometry with multiple accumulation
ZYGO CORP14 citations84
US7030995B2Apr 18, 2006
Apparatus and method for mechanical phase shifting interferometry
ZYGO CORP12 citations84
US6894788B2May 17, 2005
Interferometric system for automated radius of curvature measurements
ZYGO CORP19 citations84
US6744522B2Jun 1, 2004
Interferometer for measuring the thickness profile of thin transparent substrates
ZYGO CORP17 citations84
US7639367B2Dec 29, 2009
Interferometer system for monitoring an object
ZYGO CORP9 citations83
US7826064B2Nov 2, 2010
Interferometer system for monitoring an object
ZYGO CORP8 citations82
US8045175B2Oct 25, 2011
Equal-path interferometer
ZYGO CORP14 citations80
US7796273B2Sep 14, 2010
Phase-shifting interferometry in the presence of vibration
ZYGO CORP7 citations74
US6995848B2Feb 7, 2006
Method and apparatus for calibrating a wavelength-tuning interferometer
ZYGO CORP9 citations74
US6806965B2Oct 19, 2004
Wavefront and intensity analyzer for collimated beams
ZYGO CORP9 citations74
US6788422B2Sep 7, 2004
Method and apparatus for using quasi-stable light sources in interferometry applications
ZYGO CORP10 citations74
US10962348B2Mar 30, 2021
Method and apparatus for optimizing the optical performance of interferometers
ZYGO CORP1 citations63
US10890428B2Jan 12, 2021
Interferometric method and apparatus using calibration information relating a focus setting to a test object position
ZYGO CORP1 citations63
US10267617B2Apr 23, 2019
Method and apparatus for optimizing the optical performance of interferometers
ZYGO CORP1 citations63
US10190871B2Jan 29, 2019
Precision positioning system using a wavelength tunable laser
ZYGO CORP1 citations63
US8988690B2Mar 24, 2015
Interferometric encoder systems
ZYGO CORP2 citations63
US7948639B2May 24, 2011
Phase-shifting interferometry in the presence of vibration
ZYGO CORP1 citations63
US7796275B2Sep 14, 2010
Phase-shifting interferometry in the presence of vibration using phase bias
ZYGO CORP2 citations63
US7327469B2Feb 5, 2008
Method for compensating errors in interferometric surface metrology
ZYGO CORP6 citations63
US7042578B2May 9, 2006
Method and apparatus for absolute figure metrology
ZYGO CORP4 citations63
HONEYWELL INC
2 patentsDECK LESLIE L
2 patentsLIESENER JAN
1 patentShowing the top 50 of 58 patents by PatentIndex Score.