Inventor
TOKUNO HIROKAZU
US18 patents
⚠️ This page may combine multiple inventors who share the name “TOKUNO HIROKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPANSION LLC
11 patentsUS8367493B1Feb 5, 2013
Void free interlayer dielectric
SPANSION LLC17 citations92
US6894342B1May 17, 2005
Structure and method for preventing UV radiation damage in a memory cell and improving contact CD control
SPANSION LLC18 citations84
US6833581B1Dec 21, 2004
Structure and method for preventing process-induced UV radiation damage in a memory cell
SPANSION LLC13 citations84
US7534732B1May 19, 2009
Semiconductor devices with copper interconnects and composite silicon nitride capping layers
SPANSION LLC12 citations83
US7927723B1Apr 19, 2011
Film stacks to prevent UV-induced device damage
SPANSION LLC2 citations63
US7238571B1Jul 3, 2007
Non-volatile memory device with increased reliability
SPANSION LLC4 citations62
US7220643B1May 22, 2007
System and method for gate formation in a semiconductor device
SPANSION LLC3 citations62
US7341956B1Mar 11, 2008
Disposable hard mask for forming bit lines
SPANSION LLC4 citations61
US7157335B1Jan 2, 2007
Using thin undoped TEOS with BPTEOS ILD or BPTEOS ILD alone to improve charge loss and contact resistance in multi bit memory devices
SPANSION LLC2 citations60
US8614475B2Dec 24, 2013
Void free interlayer dielectric
SPANSION LLC0 citations52
US7888269B2Feb 15, 2011
Triple layer anti-reflective hard mask
SPANSION LLC0 citations51
ADVANCED MICRO DEVICES INC
4 patentsUS7538026B1May 26, 2009
Multilayer low reflectivity hard mask and process therefor
ADVANCED MICRO DEVICES INC8 citations83
US7307027B1Dec 11, 2007
Void free interlayer dielectric
ADVANCED MICRO DEVICES INC5 citations62
US8026169B2Sep 27, 2011
Cu annealing for improved data retention in flash memory devices
ADVANCED MICRO DEVICES INC2 citations60
US8048797B2Nov 1, 2011
Multilayer low reflectivity hard mask and process therefor
ADVANCED MICRO DEVICES INC0 citations51