Inventor

YAN XIAOLE

US2 patents

Patents

2 patents

US8652259B2Feb 18, 2014

Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition

POPPE STEVE5 citations68

US8845809B2Sep 30, 2014

Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition

POPPE STEVE0 citations36