Inventor
SPIEGEL LARRY A
US7 patents
Patents
7 patentsUS6869348B1Mar 22, 2005
Retaining ring for wafer carriers
STRASBAUGH16 citations89
US7959496B2Jun 14, 2011
Flexible membrane assembly for a CMP system and method of using
STRASBAUGH14 citations81
US7018268B2Mar 28, 2006
Protection of work piece during surface processing
STRASBAUGH13 citations80
US7063604B2Jun 20, 2006
Independent edge control for CMP carriers
STRASBAUGH7 citations71
US9393669B2Jul 19, 2016
Systems and methods of processing substrates
STRASBAUGH5 citations68
US9610669B2Apr 4, 2017
Methods and systems for use in grind spindle alignment
STRASBAUGH0 citations50
US7063605B2Jun 20, 2006
Retaining ring for wafer carriers
STRASBAUGH0 citations49