Inventor
TAWARAYAMA KAZUO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAWARAYAMA KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
3 patentsUS6558852B1May 6, 2003
Exposure method, reticle, and method of manufacturing semiconductor device
TOSHIBA KK12 citations70
US8023759B2Sep 20, 2011
Focus monitoring method
TOSHIBA KK3 citations57
US7985958B2Jul 26, 2011
Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program
TOSHIBA KK1 citations51
TOSHIBA MEMORY CORP
2 patentsUS9772566B2Sep 26, 2017
Mask alignment mark, photomask, exposure apparatus, exposure method, and manufacturing method of device
TOSHIBA MEMORY CORP0 citations49
US9885960B2Feb 6, 2018
Pattern shape adjustment method, pattern shape adjustment system, exposure apparatus, and recording medium
TOSHIBA MEMORY CORP0 citations40