P

Inventor

UENO TOORU

JP5 patents
⚠️ This page may combine multiple inventors who share the name “UENO TOORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

3 patents
US7476073B2Jan 13, 2009

Vacuum processing method

HITACHI HIGH TECH CORP2 citations58
US8033770B2Oct 11, 2011

Vacuum processing apparatus

HITACHI HIGH TECH CORP0 citations48
US7862289B2Jan 4, 2011

Vacuum processing apparatus and vacuum processing method

HITACHI HIGH TECH CORP0 citations48

HITACHI LTD

2 patents
US6920369B2Jul 19, 2005

Methods of operating vacuum processing equipment and methods of processing wafers

HITACHI LTD17 citations91
US6795745B1Sep 21, 2004

Methods of operating vacuum processing equipment and methods of processing wafers

HITACHI LTD26 citations91