Inventor

MINAMI SHIGEHARU

JP3 patents

Patents

3 patents

US7476073B2Jan 13, 2009

Vacuum processing method

HITACHI HIGH TECH CORP2 citations58

US8033770B2Oct 11, 2011

Vacuum processing apparatus

HITACHI HIGH TECH CORP0 citations48

US7862289B2Jan 4, 2011

Vacuum processing apparatus and vacuum processing method

HITACHI HIGH TECH CORP0 citations48