Inventor

UTSUMI YOSHIYUKI

JP77 patents

⚠️ This page may combine multiple inventors who share the name “UTSUMI YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UTSUMI YOSHIYUKI

TOKYO OHKA KOGYO CO LTD

Resist composition, method of forming resist pattern, novel compound, and acid generator

Resist composition, compound, polymeric compound and method of forming resist pattern

Resist composition, method of forming resist pattern, polymeric compound and compound

Resist composition, method of forming resist pattern, novel compound, and acid generator

Resist composition, method of forming resist pattern and polymeric compound

Resist composition, method of forming resist pattern and polymeric compound

Method of producing structure containing phase-separated structure and method of forming top coat film

Undercoat agent and method of producing structure containing phase-separated structure

Resist composition, acid generator, polymeric compound and method of forming resist pattern

Resist composition, method for forming resist pattern, and compound

Resist composition and method of forming resist pattern

Negative resist composition, method of forming resist pattern, and complex

Positive resist composition for immersion lithography and method for forming resist pattern

Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern

Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern

Resist composition, method of forming resist pattern and compound

Resist composition, method of forming resist pattern and novel compound

Resist composition, method of forming resist pattern, and polymeric compound

Compound, acid generator, resist composition and method of forming resist pattern

Positive-type photoresist composition, photoresist laminate, method for producing photoresist pattern, and method for producing connecting terminal

Resist composition, method of forming resist pattern, novel compound and acid generator

Negative resist composition, method of forming resist pattern and complex

Method of producing polymeric compound, resist composition and method of forming resist pattern

Polymerization method of high-molecular weight compound, resist composition, and method for forming resist pattern

Method of producing structure containing phase-separation structure, method of forming pattern, and method of forming fine pattern

UTSUMI YOSHIYUKI

Resist composition for negative development and method of forming resist pattern

Resist composition, method of forming resist pattern, compound and method of producing the same, acid generator

Resist composition, method of forming resist pattern, novel compound, and acid generator

Method of producing polymeric compound, resist composition, and method of forming resist pattern

Resist composition, method of forming resist pattern, and new compound

Positive resist composition, method of forming resist pattern, polymeric compound, and compound

Resist composition, method of forming resist pattern, and novel compound and acid generator

Positive resist composition and method of forming resist pattern

KAWAUE AKIYA

Resist composition, method of forming resist pattern, novel compound, and acid generator

Resist composition, method of forming resist pattern, polymeric compound, and compound

Resist composition, method of forming resist pattern, novel compound, and acid generator

Compound and method of producing same, acid generator, resist composition, and method of forming resist pattern

Resist composition, method of forming resist pattern, compound and acid generator

Compound, acid generator, resist composition, and method of forming resist pattern

SESHIMO TAKEHIRO

Positive resist composition and method of forming resist pattern

Resist composition, method of forming resist pattern, novel compound, and acid generator

Positive resist composition, method of forming resist pattern, and polymeric compound

Resist composition, method of forming resist pattern, novel compound, and acid generator

MITSUBISHI ELECTRIC CORP

Cruise control apparatus for a vehicle

Cruise control apparatus for a vehicle

HADA HIDEO

Resist composition, method of forming resist pattern, novel compound, and acid generator

Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern

SAN APRO LTD

Sulfonium salt and photo-acid generator

KOMURO YOSHITAKA

Compound, polymeric compound, acid generator, resist composition, and method of forming resist pattern

TOYO GOSEI CO LTD

Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist composition