Inventor

AALUND MARTIN P

US3 patents

⚠️ This page may combine multiple inventors who share the name “AALUND MARTIN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

1 patent

US7578650B2Aug 25, 2009

Quick swap load port

KLA TENCOR TECH CORP39 citations87

PRI AUTOMATION INC

1 patent

US6520726B1Feb 18, 2003

Apparatus and method for using a robot to remove a substrate carrier door

PRI AUTOMATION INC33 citations84

KAVEH FARRO

1 patent

US8744624B1Jun 3, 2014

Substrate alignment system

KAVEH FARRO6 citations63