Inventor

PANG ZHENXU

CN2 patents

⚠️ This page may combine multiple inventors who share the name “PANG ZHENXU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MA YUE

1 patent

US8518224B2Aug 27, 2013

Plating apparatus for metallization on semiconductor workpiece

MA YUE4 citations59

ACM RESEARCH SHANGHAI INC

1 patent

US8383429B2Feb 26, 2013

Method and apparatus for thermal treatment of semiconductor workpieces

ACM RESEARCH SHANGHAI INC0 citations49