Inventor
JAGER REMCO
NL14 patents
⚠️ This page may combine multiple inventors who share the name “JAGER REMCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MAPPER LITHOGRAPHY IP BV
6 patentsUS6958804B2Oct 25, 2005
Lithography system
MAPPER LITHOGRAPHY IP BV135 citations98
US7842936B2Nov 30, 2010
Lithography system and projection method
MAPPER LITHOGRAPHY IP BV20 citations92
US7709815B2May 4, 2010
Lithography system and projection method
MAPPER LITHOGRAPHY IP BV19 citations91
US7612866B2Nov 3, 2009
Lithography system
MAPPER LITHOGRAPHY IP BV5 citations73
USRE45552EJun 9, 2015
Lithography system and projection method
MAPPER LITHOGRAPHY IP BV0 citations52
US8759787B2Jun 24, 2014
Charged particle multi-beamlet lithography system with modulation device
MAPPER LITHOGRAPHY IP BV0 citations52
WIELAND MARCO JAN-JACO
5 patentsUS8492731B2Jul 23, 2013
Charged particle multi-beamlet lithography system with modulation device
WIELAND MARCO JAN-JACO9 citations83
US8604411B2Dec 10, 2013
Charged particle beam modulator
WIELAND MARCO JAN-JACO6 citations72
US8921758B2Dec 30, 2014
Modulation device and charged particle multi-beamlet lithography system using the same
WIELAND MARCO JAN-JACO4 citations71
US8841636B2Sep 23, 2014
Modulation device and charged particle multi-beamlet lithography system using the same
WIELAND MARCO JAN-JACO2 citations62
US8242470B2Aug 14, 2012
Optical switching in a lithography system
WIELAND MARCO JAN-JACO0 citations51