Inventor

OBA SHIRO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OBA SHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RENESAS TECH CORP

1 patent

US6852553B2Feb 8, 2005

Semiconductor device fabrication method and semiconductor device fabrication apparatus

RENESAS TECH CORP13 citations80

HITACHI TOBU SEMICONDUCTOR LTD

1 patent

US6946306B2Sep 20, 2005

Method of manufacturing a semiconductor device and a fabrication apparatus for a semiconductor device

HITACHI TOBU SEMICONDUCTOR LTD12 citations79