P

Inventor

CHEW HAN-GUAN

SG12 patents
⚠️ This page may combine multiple inventors who share the name “CHEW HAN-GUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEW HAN-GUAN

5 patents
US8835294B2Sep 16, 2014

Method for improving thermal stability of metal gate

CHEW HAN-GUAN10 citations83
US8304842B2Nov 6, 2012

Interconnection structure for N/P metal gates

CHEW HAN-GUAN7 citations83
US8586428B2Nov 19, 2013

Interconnection structure for N/P metal gates

CHEW HAN-GUAN4 citations62
US8664079B2Mar 4, 2014

Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate

CHEW HAN-GUAN0 citations51
US8143137B2Mar 27, 2012

Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate

CHEW HAN-GUAN0 citations51

TAIWAN SEMICONDUCTOR MFG

2 patents
US8378428B2Feb 19, 2013

Metal gate structure of a semiconductor device

TAIWAN SEMICONDUCTOR MFG3 citations63
US9105692B2Aug 11, 2015

Method of fabricating an interconnection structure in a CMOS comprising a step of forming a dummy electrode

TAIWAN SEMICONDUCTOR MFG2 citations62

CHEW HAN GUAN

2 patents
US8415236B2Apr 9, 2013

Methods for reducing loading effects during film formation

CHEW HAN GUAN0 citations50
US8668833B2Mar 11, 2014

Method of forming a nanostructure

CHEW HAN GUAN1 citations47

ZHU MING

1 patent
US8304831B2Nov 6, 2012

Method and apparatus of forming a gate

ZHU MING15 citations83

TAO LEE-WEE

1 patent
US8609484B2Dec 17, 2013

Method for forming high-K metal gate device

TAO LEE-WEE6 citations63

YU WEIBO

1 patent
US9355874B2May 31, 2016

Silicon nitride etching in a single wafer apparatus

YU WEIBO0 citations49