Inventor

YOSHIOKA MITIHIRO

2 patents

Patents

2 patents

US4292276ASep 29, 1981

Apparatus for producing silicon carbide

IBIGAWA ELECTRIC IND CO LTD19 citations79

US4162167AJul 24, 1979

Process and an apparatus for producing silicon carbide consisting mainly of beta-type crystal

IBIGAWA ELECTRIC IND CO LTD21 citations79