Inventor

JEON HEUI-SIK

KR2 patents

Patents

2 patents

US6090632AJul 18, 2000

Method for controlling semiconductor processing equipment in real time

SAMSUNG ELECTRONICS CO LTD22 citations85

US9696717B2Jul 4, 2017

Apparatus and method of segmenting sensor data output from a semiconductor manufacturing facility

SAMSUNG ELECTRONICS CO LTD0 citations30