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Inventor
CHANG YI-PIN
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YI-PIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
1 patent
US7957118B2
Jun 7, 2011
Multi-zone electrostatic chuck and chucking method
TAIWAN SEMICONDUCTOR MFG
4 citations
53
CHANG YI-PIN
1 patent
US8623141B2
Jan 7, 2014
Piping system and control for semiconductor processing
CHANG YI-PIN
2 citations
51