Inventor
NAM BYUNG HO
KR13 patents
⚠️ This page may combine multiple inventors who share the name “NAM BYUNG HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SK HYNIX INC
6 patentsUS9841668B2Dec 12, 2017
Photomasks for reducing thermal stress generated by heat
SK HYNIX INC0 citations50
US9664996B2May 30, 2017
Photomasks for reducing thermal stress generated by heat
SK HYNIX INC0 citations50
US9599887B2Mar 21, 2017
Photo mask including pre-alignment keys and photolithography apparatus performing a pre-alignment process for the photo mask
SK HYNIX INC1 citations50
US9274411B2Mar 1, 2016
Reflection type blank masks, methods of fabricating the same, and methods of fabricating reflection type photo masks using the same
SK HYNIX INC0 citations50
US9335625B2May 10, 2016
Blank masks for extreme ultra violet lithography, methods of fabricating the same, and methods of correcting registration errors thereof
SK HYNIX INC0 citations49
US8906582B2Dec 9, 2014
Blank masks for extreme ultra violet lithography, methods of fabricating the same, and methods of correcting registration errors thereof
SK HYNIX INC0 citations49
HYNIX SEMICONDUCTOR INC
3 patentsUS7422830B2Sep 9, 2008
Method for detecting failure of database patterns of photo mask
HYNIX SEMICONDUCTOR INC8 citations68
US7902671B2Mar 8, 2011
Semiconductor device having dummy pattern and the method for fabricating the same
HYNIX SEMICONDUCTOR INC2 citations61
US8021805B2Sep 20, 2011
Backside phase grating mask and method for manufacturing the same
HYNIX SEMICONDUCTOR INC5 citations60