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Inventor
UEDONO AKIRA
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “UEDONO AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MORIYA TSUYOSHI
1 patent
US8058186B2
Nov 15, 2011
Components for substrate processing apparatus and manufacturing method thereof
MORIYA TSUYOSHI
5 citations
60
FUJI ELECTRIC CO LTD
1 patent
US9905433B2
Feb 27, 2018
Manufacturing method of semiconductor device including a nitride semiconductor layer
FUJI ELECTRIC CO LTD
0 citations
49
SEMICONDUCTOR TECH ACAD RES CT
1 patent
US6919563B2
Jul 19, 2005
Defect evaluation apparatus utilizing positrons
SEMICONDUCTOR TECH ACAD RES CT
1 citations
48