Inventor
KIM EUN SUNG
KR24 patents
⚠️ This page may combine multiple inventors who share the name “KIM EUN SUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
12 patentsUS9653294B2May 16, 2017
Methods of forming fine patterns and methods of manufacturing integrated circuit devices using the methods
SAMSUNG ELECTRONICS CO LTD7 citations81
US8986554B2Mar 24, 2015
Method of forming patterns
SAMSUNG ELECTRONICS CO LTD11 citations80
US9070824B2Jun 30, 2015
Heterogeneous laminate including graphene, and thermoelectric material, thermoelectric module, and thermoelectric apparatus including the heterogeneous laminate
SAMSUNG ELECTRONICS CO LTD5 citations72
US8900468B2Dec 2, 2014
Methods of forming a pattern
SAMSUNG ELECTRONICS CO LTD6 citations72
US7825041B2Nov 2, 2010
Method of reworking a semiconductor substrate and method of forming a pattern of a semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations62
US10881257B2Jan 5, 2021
Cleaner and method for controlling cleaner
SAMSUNG ELECTRONICS CO LTD1 citations61
US10352964B2Jul 16, 2019
Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same
SAMSUNG ELECTRONICS CO LTD1 citations59
US8946089B2Feb 3, 2015
Methods of forming contact holes
SAMSUNG ELECTRONICS CO LTD1 citations51
US7697113B2Apr 13, 2010
Method of determining a focus position for a substrate exposure process and substrate exposure apparatus capable of performing the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US10138318B2Nov 27, 2018
Block copolymer and method of manufacturing integrated circuit device using the same
SAMSUNG ELECTRONICS CO LTD0 citations42
US10688437B2Jun 23, 2020
Filter structure for chemical solution used in manufacturing integrated circuit and apparatus for supplying chemical solution including filter structure for chemical solution
SAMSUNG ELECTRONICS CO LTD0 citations41
US9892918B2Feb 13, 2018
Method of forming pattern of semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations38