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Inventor
POQUÉ ANDREAS
DE
2 patents
Patents
2 patents
US9942946B2
Apr 10, 2018
Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus
AIXTRON SE
3 citations
66
US10501847B2
Dec 10, 2019
Apparatus and method for generating a vapor for a CVD or PVD device
AIXTRON SE
2 citations
65