Inventor
BECCARD BIRGIT IRMGARD
DE3 patents
Patents
3 patentsUS9942946B2Apr 10, 2018
Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus
AIXTRON SE3 citations66
US10501847B2Dec 10, 2019
Apparatus and method for generating a vapor for a CVD or PVD device
AIXTRON SE2 citations65
US10267768B2Apr 23, 2019
Device and method for determining the concentration of a vapor by means of an oscillating body sensor
AIXTRON SE1 citations53