Inventor
GALE REBECCA J
US3 patents
Patents
3 patentsUS5159752ANov 3, 1992
Scanning electron microscope based parametric testing method and apparatus
TEXAS INSTRUMENTS INC130 citations96
US5100501AMar 31, 1992
Process for selectively depositing a metal in vias and contacts by using a sacrificial layer
TEXAS INSTRUMENTS INC63 citations93
US6214736B1Apr 10, 2001
Silicon processing method
TEXAS INSTRUMENTS INC20 citations89