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Inventor
NAGAO TAKURO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “NAGAO TAKURO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
1 patent
US12046445B2
Jul 23, 2024
Electron beam inspection apparatus and electron beam inspection method
NUFLARE TECHNOLOGY INC
4 citations
65
TOSHIBA KK
1 patent
US7359043B2
Apr 15, 2008
Pattern inspecting method and pattern inspecting apparatus
TOSHIBA KK
4 citations
60