Inventor

AKHSSAY M HAMED

NL8 patents

⚠️ This page may combine multiple inventors who share the name “AKHSSAY M HAMED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents

US7403264B2Jul 22, 2008

Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus

ASML NETHERLANDS BV24 citations90

US7262831B2Aug 28, 2007

Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus

ASML NETHERLANDS BV38 citations90

US7626684B2Dec 1, 2009

Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus

ASML NETHERLANDS BV14 citations80

US9965578B2May 8, 2018

Compensation for patterning device deformation

ASML NETHERLANDS BV4 citations71

US7084952B2Aug 1, 2006

Lithographic apparatus, device manufacturing method, and computer-readable storage medium

ASML NETHERLANDS BV8 citations67

US7829249B2Nov 9, 2010

Device manufacturing method, computer program and lithographic apparatus

ASML NETHERLANDS BV4 citations55

VAN DE KERKHOF MARCUS ADRIANUS

1 patent

US8068212B2Nov 29, 2011

Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements

VAN DE KERKHOF MARCUS ADRIANUS2 citations55

AKHSSAY M HAMED

1 patent

US8810773B2Aug 19, 2014

Lithographic method and apparatus

AKHSSAY M HAMED2 citations54