Inventor

THANIGAIVELAN THIRUMAL

US2 patents

Patents

2 patents

US7767583B2Aug 3, 2010

Method to improve uniformity of chemical mechanical polishing planarization

VARIAN SEMICONDUCTOR EQUIPMENT23 citations87

US8012843B2Sep 6, 2011

Optimized halo or pocket cold implants

VARIAN SEMICONDUCTOR EQUIPMENT2 citations59