Inventor
CANTELL MARC W
US13 patents
Patents
13 patentsUS6900519B2May 31, 2005
Diffused extrinsic base and method for fabrication
IBM95 citations97
US6774000B2Aug 10, 2004
Method of manufacture of MOSFET device with in-situ doped, raised source and drain structures
IBM56 citations96
US6858903B2Feb 22, 2005
MOSFET device with in-situ doped, raised source and drain structures
IBM24 citations92
US6858532B2Feb 22, 2005
Low defect pre-emitter and pre-base oxide etch for bipolar transistors and related tooling
IBM44 citations92
US6541351B1Apr 1, 2003
Method for limiting divot formation in post shallow trench isolation processes
IBM53 citations92
US6926843B2Aug 9, 2005
Etching of hard masks
IBM45 citations91
US6255179B1Jul 3, 2001
Plasma etch pre-silicide clean
IBM24 citations91
US6184132B1Feb 6, 2001
Integrated cobalt silicide process for semiconductor devices
IBM22 citations91
US6541336B1Apr 1, 2003
Method of fabricating a bipolar transistor having a realigned emitter
IBM13 citations82
US6869854B2Mar 22, 2005
Diffused extrinsic base and method for fabrication
IBM5 citations62
US7446007B2Nov 4, 2008
Multi-layer spacer with inhibited recess/undercut and method for fabrication thereof
IBM5 citations61
US6793735B2Sep 21, 2004
Integrated cobalt silicide process for semiconductor devices
IBM0 citations50
US8846481B2Sep 30, 2014
Transistor and method of forming the transistor so as to have reduced base resistance
IBM1 citations48