Inventor
ADERHOLD WOLFGANG R
US30 patents
⚠️ This page may combine multiple inventors who share the name “ADERHOLD WOLFGANG R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
26 patentsUS6215106B1Apr 10, 2001
Thermally processing a substrate
APPLIED MATERIALS INC87 citations95
US10741457B2Aug 11, 2020
System for non radial temperature control for rotating substrates
APPLIED MATERIALS INC4 citations84
US9245768B2Jan 26, 2016
Method of improving substrate uniformity during rapid thermal processing
APPLIED MATERIALS INC7 citations84
US8865602B2Oct 21, 2014
Edge ring lip
APPLIED MATERIALS INC8 citations84
US9728471B2Aug 8, 2017
System for non radial temperature control for rotating substrates
APPLIED MATERIALS INC3 citations73
US10571337B2Feb 25, 2020
Thermal cooling member with low temperature control
APPLIED MATERIALS INC2 citations72
US7778533B2Aug 17, 2010
Semiconductor thermal process control
APPLIED MATERIALS INC5 citations71
US12080573B2Sep 3, 2024
Temperature offset and zone control tuning
APPLIED MATERIALS INC2 citations67
US12588455B2Mar 24, 2026
Dopant diffusion with short high temperature anneal pulses
APPLIED MATERIALS INC0 citations62
US12366481B2Jul 22, 2025
Reflector plate for substrate processing
APPLIED MATERIALS INC0 citations62
US12176242B2Dec 24, 2024
Rotatable thermal processing chamber
APPLIED MATERIALS INC0 citations62
US11942381B2Mar 26, 2024
System for non radial temperature control for rotating substrates
APPLIED MATERIALS INC0 citations62
US11828656B2Nov 28, 2023
Reflector plate for substrate processing
APPLIED MATERIALS INC0 citations62
US11469100B2Oct 11, 2022
Methods of post treating dielectric films with microwave radiation
APPLIED MATERIALS INC0 citations62
US11373871B2Jun 28, 2022
Methods and apparatus for integrated selective monolayer doping
APPLIED MATERIALS INC0 citations62
US10948353B2Mar 16, 2021
Thermal processing chamber with low temperature control
APPLIED MATERIALS INC0 citations62
US7195934B2Mar 27, 2007
Method and system for deposition tuning in an epitaxial film growth apparatus
APPLIED MATERIALS INC5 citations62
US11664250B2May 30, 2023
Methods and apparatus for measuring edge ring temperature
APPLIED MATERIALS INC0 citations60
US11342209B2May 24, 2022
Methods and apparatus for measuring edge ring temperature
APPLIED MATERIALS INC0 citations60
US7667162B2Feb 23, 2010
Semiconductor thermal process control utilizing position oriented temperature generated thermal mask
APPLIED MATERIALS INC2 citations60
US12533717B2Jan 27, 2026
Process chamber clean
APPLIED MATERIALS INC0 citations56
US11915953B2Feb 27, 2024
Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers
APPLIED MATERIALS INC1 citations56
US12085965B2Sep 10, 2024
Systems, methods, and apparatus for correcting thermal processing of substrates
APPLIED MATERIALS INC0 citations52
US11492698B2Nov 8, 2022
Optically transparent pedestal for fluidly supporting a substrate
APPLIED MATERIALS INC0 citations52
US10330535B2Jun 25, 2019
Pyrometer background elimination
APPLIED MATERIALS INC0 citations52
US9759615B2Sep 12, 2017
Pyrometer background elimination
APPLIED MATERIALS INC0 citations52