Inventor
KOELMEL BLAKE
US24 patents
⚠️ This page may combine multiple inventors who share the name “KOELMEL BLAKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOELMEL BLAKE
10 patentsUS8057602B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE63 citations97
US8744250B2Jun 3, 2014
Edge ring for a thermal processing chamber
KOELMEL BLAKE13 citations92
US8434937B2May 7, 2013
Method and apparatus for detecting the substrate temperature in a laser anneal system
KOELMEL BLAKE11 citations84
US8057601B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE11 citations84
US8388853B2Mar 5, 2013
Non-contact substrate processing
KOELMEL BLAKE6 citations83
US9245786B2Jan 26, 2016
Apparatus and methods for positioning a substrate using capacitive sensors
KOELMEL BLAKE8 citations82
US8755680B2Jun 17, 2014
Edge ring for a thermal processing chamber
KOELMEL BLAKE3 citations62
US8490660B2Jul 23, 2013
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE3 citations62
US8309475B2Nov 13, 2012
Apparatus and method of aligning and positioning a cold substrate on a hot surface
KOELMEL BLAKE2 citations62
US8097543B2Jan 17, 2012
Apparatus and method of aligning and positioning a cold substrate on a hot surface
KOELMEL BLAKE1 citations52
APPLIED MATERIALS INC
10 patentsUS7754518B2Jul 13, 2010
Millisecond annealing (DSA) edge protection
APPLIED MATERIALS INC15 citations91
US8865602B2Oct 21, 2014
Edge ring lip
APPLIED MATERIALS INC8 citations84
US7985945B2Jul 26, 2011
Method for reducing stray light in a rapid thermal processing chamber by polarization
APPLIED MATERIALS INC8 citations84
US10074555B2Sep 11, 2018
Non-contact substrate processing
APPLIED MATERIALS INC4 citations73
US7923280B2Apr 12, 2011
Millisecond annealing (DSA) edge protection
APPLIED MATERIALS INC5 citations72
US9076828B2Jul 7, 2015
Edge ring for a thermal processing chamber
APPLIED MATERIALS INC1 citations63
US8761587B2Jun 24, 2014
Apparatus and method for measuring radiation energy during thermal processing
APPLIED MATERIALS INC2 citations63
US10483145B2Nov 19, 2019
Wafer edge measurement and control
APPLIED MATERIALS INC0 citations52
US9786537B2Oct 10, 2017
Wafer edge measurement and control
APPLIED MATERIALS INC1 citations52
US9130001B2Sep 8, 2015
Edge ring for a thermal processing chamber
APPLIED MATERIALS INC0 citations52