Inventor
JUCO ELLER
US3 patents
Patents
3 patentsUS5994678ANov 30, 1999
Apparatus for ceramic pedestal and metal shaft assembly
APPLIED MATERIALS INC89 citations95
US7628863B2Dec 8, 2009
Heated gas box for PECVD applications
APPLIED MATERIALS INC20 citations90
US12400833B2Aug 26, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations48