Inventor
OBARA KAZUTERU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OBARA KAZUTERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS10431479B2Oct 1, 2019
Heat treatment apparatus and temperature control method
TOKYO ELECTRON LTD2 citations71
US11656126B2May 23, 2023
Heat treatment apparatus and temperature control method
TOKYO ELECTRON LTD0 citations61
US12196492B2Jan 14, 2025
Heat treatment apparatus and heat treatment method
TOKYO ELECTRON LTD0 citations60
US11581201B2Feb 14, 2023
Heat treatment apparatus and film deposition method
TOKYO ELECTRON LTD0 citations56
US10533896B2Jan 14, 2020
Heat treatment apparatus and temperature control method
TOKYO ELECTRON LTD0 citations51
US11784070B2Oct 10, 2023
Heat treatment apparatus, heat treatment method, and film forming method
TOKYO ELECTRON LTD0 citations47
US11674224B2Jun 13, 2023
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations47