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Inventor
YANG LISA L
US
2 patents
Patents
2 patents
US6149784A
Nov 21, 2000
Sputtering chamber shield promoting reliable plasma ignition
APPLIED MATERIALS INC
66 citations
93
US6426282B1
Jul 30, 2002
Method of forming solder bumps on a semiconductor wafer
APPLIED MATERIALS INC
28 citations
89