Inventor
REECE RONALD N
US4 patents
Patents
4 patentsUS6828572B2Dec 7, 2004
Ion beam incident angle detector for ion implant systems
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US10903097B2Jan 26, 2021
In-situ wafer temperature measurement and control
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US7511287B2Mar 31, 2009
Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases
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US9490185B2Nov 8, 2016
Implant-induced damage control in ion implantation
AXCELIS TECH INC0 citations34