Inventor · disambiguated record
Kanji Sugino
Also filed as: SUGINO KANJI
3 granted patents·1 pending application·95 citations·filing 1999–2011
70Inventor score
Top patents by PatentIndex Score
4 records- 0183US6180320B1Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured therebyMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Jan 30, 2001·70 cites·17 claims
- 0258US6566040B1Method of manufacturing a semiconductor device and semiconductor device manufactured by the methodMITSUBISHI ELECTRIC CORP·Filed 1999·Granted May 20, 2003·25 cites·17 claims
- 0340US2008180647A1Focus monitor mark, focus monitoring method, and device production methodELPIDA MEMORY INC·Filed 2008·Application pending·0 cites
- 0433US8932882B2Method of manufacturing semiconductor deviceTAKANO KATSUSHI·Filed 2011·Granted Jan 13, 2015·0 cites·18 claims
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