Inventor
MA YI
US94 patents
⚠️ This page may combine multiple inventors who share the name “MA YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
15 patentsUS6025280AFeb 15, 2000
Use of SiD4 for deposition of ultra thin and controllable oxides
LUCENT TECHNOLOGIES INC282 citations99
US6011404AJan 4, 2000
System and method for determining near--surface lifetimes and the tunneling field of a dielectric in a semiconductor
LUCENT TECHNOLOGIES INC166 citations99
US5940736AAug 17, 1999
Method for forming a high quality ultrathin gate oxide layer
LUCENT TECHNOLOGIES INC264 citations98
US6207586B1Mar 27, 2001
Oxide/nitride stacked gate dielectric and associated methods
LUCENT TECHNOLOGIES INC55 citations96
US6162711ADec 19, 2000
In-situ boron doped polysilicon with dual layer and dual grain structure for use in integrated circuits manufacturing
LUCENT TECHNOLOGIES INC110 citations93
US6147388ANov 14, 2000
Polycide gate structure with intermediate barrier
LUCENT TECHNOLOGIES INC20 citations93
US5981403ANov 9, 1999
Layered silicon nitride deposition process
LUCENT TECHNOLOGIES INC25 citations93
US6274490B1Aug 14, 2001
Method of manufacturing semiconductor devices having high pressure anneal
LUCENT TECHNOLOGIES INC30 citations92
US6013418AJan 11, 2000
Method for developing images in energy sensitive materials
LUCENT TECHNOLOGIES INC24 citations92
US5846871ADec 8, 1998
Integrated circuit fabrication
LUCENT TECHNOLOGIES INC25 citations92
US5814562ASep 29, 1998
Process for semiconductor device fabrication
LUCENT TECHNOLOGIES INC32 citations92
US5960302ASep 28, 1999
Method of making a dielectric for an integrated circuit
LUCENT TECHNOLOGIES INC48 citations91
US5908312AJun 1, 1999
Semiconductor device fabrication
LUCENT TECHNOLOGIES INC39 citations90
US6074933AJun 13, 2000
Integrated circuit fabrication
LUCENT TECHNOLOGIES INC7 citations74
US6177363B1Jan 23, 2001
Method for forming a nitride layer suitable for use in advanced gate dielectric materials
LUCENT TECHNOLOGIES INC10 citations72
AGERE SYST GUARDIAN CORP
9 patentsUS6320238B1Nov 20, 2001
Gate structure for integrated circuit fabrication
AGERE SYST GUARDIAN CORP89 citations98
US6246095B1Jun 12, 2001
System and method for forming a uniform thin gate oxide layer
AGERE SYST GUARDIAN CORP250 citations98
US6417570B1Jul 9, 2002
Layered dielectric film structure suitable for gate dielectric application in sub-0.25 μm technologies
AGERE SYST GUARDIAN CORP37 citations93
US6281138B1Aug 28, 2001
System and method for forming a uniform thin gate oxide layer
AGERE SYST GUARDIAN CORP20 citations92
US6451660B1Sep 17, 2002
Method of forming bipolar transistors comprising a native oxide layer formed on a substrate by rinsing the substrate in ozonated water
AGERE SYST GUARDIAN CORP18 citations90
US6313007B1Nov 6, 2001
Semiconductor device, trench isolation structure and methods of formations
AGERE SYST GUARDIAN CORP19 citations87
US6235560B1May 22, 2001
Silicon-germanium transistor and associated methods
AGERE SYST GUARDIAN CORP18 citations84
US6309932B1Oct 30, 2001
Process for forming a plasma nitride film suitable for gate dielectric application in sub-0.25 μm technologies
AGERE SYST GUARDIAN CORP14 citations74
US6440829B1Aug 27, 2002
N-profile engineering at the poly/gate oxide and gate oxide/SI interfaces through NH3 annealing of a layered poly/amorphous-silicon structure
AGERE SYST GUARDIAN CORP8 citations72
AGERE SYSTEMS INC
4 patentsUS6509242B2Jan 21, 2003
Heterojunction bipolar transistor
AGERE SYSTEMS INC56 citations95
US6548854B1Apr 15, 2003
Compound, high-K, gate and capacitor insulator layer
AGERE SYSTEMS INC37 citations93
US6518622B1Feb 11, 2003
Vertical replacement gate (VRG) MOSFET with a conductive layer adjacent a source/drain region and method of manufacture therefor
AGERE SYSTEMS INC35 citations90
US6670242B1Dec 30, 2003
Method for making an integrated circuit device including a graded, grown, high quality gate oxide layer and a nitride layer
AGERE SYSTEMS INC16 citations81
APPLIED MATERIALS INC
4 patentsUS8043907B2Oct 25, 2011
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC42 citations92
US7910446B2Mar 22, 2011
Integrated scheme for forming inter-poly dielectrics for non-volatile memory devices
APPLIED MATERIALS INC39 citations92
US7659158B2Feb 9, 2010
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC25 citations92
US7078302B2Jul 18, 2006
Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal
APPLIED MATERIALS INC28 citations91
MA YI
3 patentsLEE WEI TI
2 patentsUNIV SHANGHAI TECHNOLOGY
2 patentsOMNIVISION TECH INC
2 patentsBOTBOTBOTBOT INC
1 patentSHENZHEN NEARBYEXPRESS TECH DEVELOPMENT COMPANY LIMITED
1 patentSHENZHEN LI ZHONG XIANG TECH CO LTD
1 patentZHANG XIN
1 patentSPANSION LLC
1 patentGOPALAN CHAKRAVARTHY
1 patentZHANG ZHENGDONG
1 patentREN ZHIFENG
1 patentGALLO ANTONIO R
1 patentShowing the top 50 of 94 patents by PatentIndex Score.