Inventor · disambiguated record

Chia-Tsung Shih

Also filed as: SHIH CHIA-TSUNG

1 granted patent·85 citations·filing 2012–2012

52Inventor score

Technology areasG03F

Files withSHIH CHIA-TSUNG1

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1 record

0194US8765330B2Phase shift mask for extreme ultraviolet lithography and method of fabricating sameSHIH CHIA-TSUNG·Filed 2012·Granted Jul 1, 2014·85 cites·20 claims

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Chia-Tsung Shih — Patent Inventor | PatentIndex