Inventor
YUSA SATOSHI
JP3 patents
Patents
3 patentsUS6599667B2Jul 29, 2003
Halftone phase shift photomask and blank for halftone phase shift photomask
DAINIPPON PRINTING CO LTD41 citations90
US6869736B2Mar 22, 2005
Halftone phase shift photomask and blank for halftone phase shift photomask
DAINIPPON PRINTING CO LTD15 citations82
US6458496B2Oct 1, 2002
Blank for halftone phase shift photomask and halftone phase shift photomask
DAINIPPON PRINTING CO LTD12 citations71