Inventor · disambiguated record
Shigeki Sumida
Also filed as: SUMIDA SHIGEKI
3 granted patents·68 citations·filing 2000–2001
73Inventor score
Files withDAINIPPON PRINTING CO LTD3
Top patents by PatentIndex Score
3 records- 0189US6599667B2Halftone phase shift photomask and blank for halftone phase shift photomaskDAINIPPON PRINTING CO LTD·Filed 2001·Granted Jul 29, 2003·41 cites·10 claims
- 0275US6869736B2Halftone phase shift photomask and blank for halftone phase shift photomaskDAINIPPON PRINTING CO LTD·Filed 2001·Granted Mar 22, 2005·15 cites·6 claims
- 0367US6458496B2Blank for halftone phase shift photomask and halftone phase shift photomaskDAINIPPON PRINTING CO LTD·Filed 2000·Granted Oct 1, 2002·12 cites·34 claims
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