Inventor
NAKAGAWA HIRO-O
JP5 patents
Patents
5 patentsUS6599667B2Jul 29, 2003
Halftone phase shift photomask and blank for halftone phase shift photomask
DAINIPPON PRINTING CO LTD41 citations90
US6869736B2Mar 22, 2005
Halftone phase shift photomask and blank for halftone phase shift photomask
DAINIPPON PRINTING CO LTD15 citations82
US6458496B2Oct 1, 2002
Blank for halftone phase shift photomask and halftone phase shift photomask
DAINIPPON PRINTING CO LTD12 citations71
US6740455B2May 25, 2004
Photomask
DAINIPPON PRINTING CO LTD5 citations61
US6933082B2Aug 23, 2005
Photomask with dust-proofing device and exposure method using the same
DAINIPPON PRINTING CO LTD1 citations49