Inventor

SCHRAVENDIJK BART VAN

US2 patents

Patents

2 patents

US7745346B2Jun 29, 2010

Method for improving process control and film conformality of PECVD film

NOVELLUS SYSTEMS INC538 citations96

US6787483B1Sep 7, 2004

Gap fill for high aspect ratio structures

NOVELLUS SYSTEMS INC21 citations91