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Inventor
SCIACCA BENIAMINO
FR
2 patents
⚠️ This page may combine multiple inventors who share the name “SCIACCA BENIAMINO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
1 patent
US11086232B2
Aug 10, 2021
Mark, overlay target, and methods of alignment and overlay
ASML NETHERLANDS BV
5 citations
68
TNO
1 patent
US11808698B2
Nov 7, 2023
Analyte detector with nano-antennas
TNO
0 citations
45