Inventor
ROSENTHAL CHRISTOPHER
US3 patents
Patents
3 patentsUS8950459B2Feb 10, 2015
Debonding temporarily bonded semiconductor wafers
SUSS MICROTEC LITHOGRAPHY GMBH10 citations81
US9583374B2Feb 28, 2017
Debonding temporarily bonded semiconductor wafers
SUSS MICROTEC LITHOGRAPHY GMBH4 citations70
US9472437B2Oct 18, 2016
Debonding temporarily bonded semiconductor wafers
SUSS MICROTEC LITHOGRAPHY GMBH4 citations70