Inventor
MINOBE TAKESHI
JP3 patents
Patents
3 patentsUS5929976AJul 27, 1999
Process for exposing a peripheral area of a wafer and a device for executing the process
USHIO ELECTRIC INC75 citations92
US5880816AMar 9, 1999
Process for exposing the peripheral area of a semiconductor wafer for removing unnecessary resist on the semiconductor wafer and a device for executing the process
USHIO ELECTRIC INC34 citations90
US6280060B1Aug 28, 2001
Cooling arrangement of a heating device of the light irradiation type
USHIO ELECTRIC INC11 citations71