Inventor

KIM JUNG-HONG

KR2 patents

Patents

2 patents

US6896736B2May 24, 2005

Photoresist purge control of semiconductor wafer coating equipment

SAMSUNG ELECTRONICS CO LTD7 citations70

US7144601B2Dec 5, 2006

Method of purging photoresist from semiconductor wafer coating apparatus

SAMSUNG ELECTRONICS CO LTD0 citations48