Inventor

SAITA YOSHITAKA

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SAITA YOSHITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US6972264B2Dec 6, 2005

Method and apparatus for etching Si

TOKYO ELECTRON LTD2 citations55

OHNO TSUYOSHI

1 patent

US8778205B2Jul 15, 2014

Processing method and processing system

OHNO TSUYOSHI0 citations29